As noted, when the number of items exceeds the limit, the SplitOn capability gets disabled. So instead of running concurrent, each item should be treated as a separate event and the workflow will execute separately. You could try to configure your trigger so that instances run sequentially, but I don't think that will address the error you're getting.
The fact you're getting InvalidTemplate
error hints to me that there's either a syntax error, invalid property value(s), or something went wrong with an input parameter. The failed run should indicate what caused the InvalidTemplate
error to fail.
If you can't, feel free share the workflow definition of the trigger and I can see if I run into the same issue.